JPH0222285U - - Google Patents
Info
- Publication number
- JPH0222285U JPH0222285U JP9743288U JP9743288U JPH0222285U JP H0222285 U JPH0222285 U JP H0222285U JP 9743288 U JP9743288 U JP 9743288U JP 9743288 U JP9743288 U JP 9743288U JP H0222285 U JPH0222285 U JP H0222285U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- inert gas
- variable atmosphere
- atmosphere device
- evacuated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 3
- 238000000746 purification Methods 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9743288U JPH0222285U (en]) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9743288U JPH0222285U (en]) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0222285U true JPH0222285U (en]) | 1990-02-14 |
Family
ID=31322900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9743288U Pending JPH0222285U (en]) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222285U (en]) |
-
1988
- 1988-07-25 JP JP9743288U patent/JPH0222285U/ja active Pending